Terbium-based extreme ultraviolet multilayers
نویسندگان
چکیده
منابع مشابه
Terbium-based extreme ultraviolet multilayers.
We have fabricated periodic multilayers that comprise either Si/Tb or SiC/Tb bilayers, designed to operate as narrowband reflective coatings near 60 nm wavelength in the extreme ultraviolet (EUV). We find peak reflectance values in excess of 20% near normal incidence. The spectral bandpass of the best Si/Tb multilayer was measured to be 6.5 nm full width at half-maximum (FWHM), while SiC/Tb mul...
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ژورنال
عنوان ژورنال: Optics Letters
سال: 2005
ISSN: 0146-9592,1539-4794
DOI: 10.1364/ol.30.003186